Details
It has not been tested.
It will be shipped via freight, please contact us for a shipping quote.
Original Manufacturer Description:
The AP-600™ plasma system delivers exceptionally uniform plasma cleaning and treatment for semiconductor,
microelectronic packaging and assembly, and medical device manufacturing.
The AP-600 system provides:
• Durable high-quality aluminum construction and fixtures
• Up to 7 removable and adjustable powered or grounded shelves for a wide range of piece-parts, components, and part carriers including magazines, trays, and boats
• A compact, self-contained system chassis that houses the plasma chamber, control electronics, 13.56 MHz RF generator, and the automatic matching network (only the vacuum pump is external to the system)
• An intuitive touch-screen control panel for real-time process monitoring
• Convenient facility hook-ups for periodic calibration requirements used in validation processes
• Support for a wide range of process gases including argon, oxygen, helium, and fluorinated gases
• Maintenance access through an interlocked door or removable panels
• Two standard electronic mass flow controllers for optimal gas control, with an option for two additional controllers (4 maximum)
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